Search results

Publication date Communities Collections Article title Author(s) Journal/Conference
14 May 2024 SERC Institute of Microelectronics 1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate Amy S. K. Tong, Wing Wai Chung, Charmaine Goh, Landobasa Y. M. Tobing, Leh Woon Lim, Yuriy A. Akimov, Zhan Jiang Quek, Aravind P. Anthur, Jia Sheng Goh, Huamao Lin, Navab Singh, Qingxin Zhang, Doris K. T. Ng Optical Fiber Communication Conference (OFC) 2024
7 Feb 2024 SERC Institute of Microelectronics Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters Xinghua Wang, Chen Liu, Ying Zhang, Wenjia Yang, You Qian, Peng Liu, Zhan Jiang Quek, Yan Hong, Eugene Yi, Zhun Woo, Huamao Lin, Qingxin Zhang, Peter Hyun Kee Chang, Yao Zhu 2023 International Electron Devices Meeting (IEDM)
30 Jan 2024 SERC Institute of Microelectronics Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin, Yao Zhu Materials
29 Sep 2023 SERC Institute of Microelectronics Process Optimization of Sc0.2Al0.8N Bimorph Stack Deposition on 200mm Si Wafer Peng Liu, Minghua Li, Huamao Lin, Zhan Jiang Quek, Binni Varghese, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices Zhan Jiang Quek, Yijun Lim, Minghua Li, Huamao Lin, Yan Hong 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)