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7 Feb 2024
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SERC
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Institute of Microelectronics
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Thin Sc<sub>0.2</sub>Al<sub>0.8</sub>N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters (Pending publish)
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Xinghua Wang,
Chen Liu,
Ying Zhang,
Wenjia Yang,
You Qian,
Peng Liu,
Zhan Jiang Quek,
Yan Hong,
Eugene Yi,
Zhun Woo,
Huamao Lin,
Qingxin Zhang,
Peter Hyun Kee Chang,
Yao Zhu
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2023 International Electron Devices Meeting (IEDM)
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30 Jan 2024
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SERC
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Institute of Microelectronics
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Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array (Pending publish)
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Li Chen,
Chen Liu,
Hock Koon Lee,
Binni Varghese,
Ronald Wing Fai Ip,
Minghua Li,
Zhan Jiang Quek,
Yan Hong,
Weijie Wang,
Wendong Song,
Huamao Lin,
Yao Zhu
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Materials
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7 Nov 2023
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SERC
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Institute of Microelectronics
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Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d33,f and e31,f) in 100 nm-500 nm Sc0.3Al0.7N films
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Chen Liu,
Binni Varghese,
Patrick Peng Liu,
Huamao Lin,
Minghua Li,
Yao Zhu
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2023 IEEE International Ultrasonics Symposium (IUS)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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Process Optimization of Sc0.2Al0.8N Bimorph Stack Deposition on 200mm Si Wafer
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Peng Liu,
Minghua Li,
Huamao Lin,
Zhan Jiang Quek,
Binni Varghese,
Yao Zhu
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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The Effect of Molybdenum Grain Characteristics on Ferroelectric Al0.7Sc0.3N Film Properties
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Minghua Li,
Huamao Lin,
Binni Varghese,
Yao Zhu
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices
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Zhan Jiang Quek,
Yijun Lim,
Minghua Li,
Huamao Lin,
Yan Hong
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film
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Subhranu Samanta,
Chen Liu,
Zichu Wang,
Li Chen,
Yao Zhu,
Minghua Li,
Binni Varghese,
Huamao Lin,
Hock Koon Lee
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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Leakage Mechanism of Ferroelectric Al0.7Sc0.3N Ultra-thin Film
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Li Chen,
Zichu Wang,
Chen Liu,
Minghua Li,
Wendong Song,
Weijie Wang,
Binni Varghese,
Hock Koon Lee,
Huamao Lin,
Yao Zhu
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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29 Sep 2023
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SERC
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Institute of Microelectronics
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Thermal Assisted Intermixing at AlScN/Pt Interfaces
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Minghua Li,
Wendong Song,
Chen Liu,
Li Chen,
Huamao Lin,
Yao Zhu
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2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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3 Jul 2023
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SERC
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Institute of Microelectronics
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Ultrathin Pt and Mo films on Al1–Sc N: an interface investigation (Pending publish)
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Yishui Ding,
Xiangyu Hou,
Tengyu Jin,
Yanan Wang,
Xu Lian,
Yuan Liu,
Yihe Wang,
Sisheng Duan,
Xiangrui Geng,
Meng Wang,
Jingyu Mao,
Yuanyuan Zhang,
Peirong Tang,
Minghua Li,
Huamao Lin,
Yao Zhu,
Siewlang Teo,
Qiang Zhu,
Ming Lin,
Wei Chen
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Applied Surface Science
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