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Publication date Communities Collections Article title Author(s) Journal/Conference
30 Jan 2024 SERC Institute of Microelectronics Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin, Yao Zhu Materials
12 Jan 2024 SERC Institute of Microelectronics Leakage Mechanism and Cycling Behavior of Ferroelectric Al0.7Sc0.3N Li Chen, Qiang Wang, Chen Liu, Minghua Li, Wendong Song, Weijie Wang, Desmond K. Loke, Yao Zhu Materials
9 Oct 2023 SERC Institute of Microelectronics Piezoelectric MEMS for Frequency Control and Sensing Yao Zhu, Bhattacharya Shashwat, Wenjia Yang, Li Chen, Ying Zhang, Chen Liu 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
9 Oct 2023 SERC Institute of Microelectronics Impact of Asymmetric Piezoelectricity of 100 nm Al0.7Sc0.3N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators Li Chen, Wenjia Yang, Chen Liu, Minghua Li, Nan Wang, Yao Zhu 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
29 Sep 2023 SERC Institute of Microelectronics First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film Subhranu Samanta, Chen Liu, Zichu Wang, Li Chen, Yao Zhu, Minghua Li, Binni Varghese, Huamao Lin, Hock Koon Lee 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Leakage Mechanism of Ferroelectric Al0.7Sc0.3N Ultra-thin Film Li Chen, Zichu Wang, Chen Liu, Minghua Li, Wendong Song, Weijie Wang, Binni Varghese, Hock Koon Lee, Huamao Lin, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Thermal Assisted Intermixing at AlScN/Pt Interfaces Minghua Li, Wendong Song, Chen Liu, Li Chen, Huamao Lin, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Performance Improvement via Stack Engineering and Post-bake Retention State Stabilization in Fully CMOS Compatible HfO2-based RRAM Subhranu Samanta, Chen Zhixian, Hock Koon Lee, Weijie Wang, Song Wendong, Yao Zhu, Li Chen, Chen Liu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics In-wafer Stress-dependent Leakage Current in Ferroelectric Scandium-doped Aluminum Nitride Li Chen, Chen Liu, Zichu Wang, Minghua Li, Wendong Song, Weijie Wang, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
27 Sep 2023 SERC Institute of Microelectronics Stress effect on the leakage current distribution of ferroelectric Al0.7Sc0.3N across the wafer Wanwang Yang, Li Chen, Minghua Li, Fei Liu, Xiaoyan Liu, Chen Liu, Jinfeng Kang Applied Physics Letters