Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
29 Sep 2023 | SERC | Institute of Microelectronics | Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices | Zhan Jiang Quek, Yijun Lim, Minghua Li, Huamao Lin, Yan Hong | 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF) |