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Publication date Communities Collections Article title Author(s) Journal/Conference
16 Jul 2021 SERC Institute of Microelectronics NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector Doris Keh Ting Ng, Chong Pei Ho, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin Jiaqiang Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Yao Ting Lee Sensors and Actuators B: Chemical
15 Mar 2021 SERC Institute of Microelectronics Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing Doris K. T. Ng, Chong-Pei Ho, Linfang Xu, Tantan Zhang, Li-Yan Siow, Eldwin J. Ng, Hong Cai, Qingxin Zhang, Lennon Y. T. Lee 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
15 Mar 2021 SERC Institute of Microelectronics Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride Doris K. T. Ng, Tantan Zhang, Li-Yan Siow, Linfang Xu, Chong-Pei Ho, Hong Cai, Lennon Y. T. Lee, Qingxin Zhang, Navab Singh 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
4 Mar 2021 SERC Institute of Microelectronics Photonic crystal MEMS emitter for chemical gas sensing Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Y. T. Lee MOEMS and Miniaturized Systems XX
17 Aug 2020 SERC Institute of Microelectronics Considerations for an 8-inch Wafer-level CMOS compatible AlN Pyroelectric 5-14 um wavelength IR detector towards miniature integrated photonics gas sensors Doris K. T. Ng, Guoqiang Wu, Tan-Tan Zhang, Linfang Xu, Jianbo Sun, Wing-Wai Chung, Hong Cai, Qingxin Zhang, Navab Singh IEEE Xplore
30 May 2017 SERC Institute of Microelectronics Wafer-Level Vacuum-Packaged Piezoelectric Energy Harvesters Utilizing Two-Step Three-Wafer Bonding Qingxin Zhang, Yuandong Gu, Nan Wang, Li Yan Siow, Lionel You Liang Wong, Chengliang Sun, Hongmiao Ji, Darmayuda I Made, Peter Chang 2017 IEEE 67th Electronic Components and Technology Conference (ECTC)
1 Feb 2014 SERC Institute of Microelectronics A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect Qingxin Zhang, Yuandong Gu, Dim-Lee Kwong, Chengliang Sun, Xiaojing Mu, Li Yan Siow, Wei Mong Tsang, Hongmiao Ji, Hyun Kee Chang IEEE Electron Device Letters