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16 Jul 2021
SERC
Institute of Microelectronics
NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector
Doris Keh Ting Ng,
Chong Pei Ho,
Linfang Xu,
Weiguo Chen,
Yuan Hsing Fu,
Tantan Zhang,
Li Yan Siow,
Norhanani Jaafar,
Eldwin Jiaqiang Ng,
Yuan Gao,
Hong Cai,
Qingxin Zhang,
Lennon Yao Ting Lee
Sensors and Actuators B: Chemical
15 Mar 2021
SERC
Institute of Microelectronics
Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
Doris K. T. Ng,
Chong-Pei Ho,
Linfang Xu,
Tantan Zhang,
Li-Yan Siow,
Eldwin J. Ng,
Hong Cai,
Qingxin Zhang,
Lennon Y. T. Lee
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
15 Mar 2021
SERC
Institute of Microelectronics
Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride
Doris K. T. Ng,
Tantan Zhang,
Li-Yan Siow,
Linfang Xu,
Chong-Pei Ho,
Hong Cai,
Lennon Y. T. Lee,
Qingxin Zhang,
Navab Singh
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
4 Mar 2021
SERC
Institute of Microelectronics
Photonic crystal MEMS emitter for chemical gas sensing
Nanxi Li,
Qin Chao,
Zhonghua Gu,
Shiwei Song,
Yanyan Zhou,
Shaonan Zheng,
Linfang Xu,
Yun Da Chua,
Qingxin Zhang,
Hong Cai,
Daohua Zhang,
Qi Jie Wang,
Lennon Y. T. Lee
MOEMS and Miniaturized Systems XX
17 Aug 2020
SERC
Institute of Microelectronics
Considerations for an 8-inch Wafer-level CMOS compatible AlN Pyroelectric 5-14 um wavelength IR detector towards miniature integrated photonics gas sensors
Doris K. T. Ng,
Guoqiang Wu,
Tan-Tan Zhang,
Linfang Xu,
Jianbo Sun,
Wing-Wai Chung,
Hong Cai,
Qingxin Zhang,
Navab Singh
IEEE Xplore
30 May 2017
SERC
Institute of Microelectronics
Wafer-Level Vacuum-Packaged Piezoelectric Energy Harvesters Utilizing Two-Step Three-Wafer Bonding
Qingxin Zhang,
Yuandong Gu,
Nan Wang,
Li Yan Siow,
Lionel You Liang Wong,
Chengliang Sun,
Hongmiao Ji,
Darmayuda I Made,
Peter Chang
2017 IEEE 67th Electronic Components and Technology Conference (ECTC)
1 Feb 2014
SERC
Institute of Microelectronics
A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect
Qingxin Zhang,
Yuandong Gu,
Dim-Lee Kwong,
Chengliang Sun,
Xiaojing Mu,
Li Yan Siow,
Wei Mong Tsang,
Hongmiao Ji,
Hyun Kee Chang
IEEE Electron Device Letters
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