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Publication date Communities Collections Article title Author(s) Journal/Conference
18 Sep 2024 SERC Institute of Microelectronics 1D Line-scan Metalens Integrated with MEMS Actuator for Depth Sensing Applications Yuan Hsing Fu, Roberto Carminati, Huanhuan Wang, Leh Woon Lim, Narak Choi, Keng Heng Lai, Charmaine Shuyan Goh, Yat Fung Tsang, Navab Singh, Qingxin Zhang Conference on Lasers and Electro-Optics 2024
7 May 2024 SERC Institute of Microelectronics Monolithic Integration of ScAlN MEMS Filter on RFSOI Using ALD Al2O3 as VHF Barrier Xinghua Wang, Ying Zhang, Chen Liu, Eugene Yi Zhun Woo, Wenjia Yang, Nan Wang, Yao Zhu, Qingxin Zhang 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
12 Mar 2024 SERC Institute of Microelectronics High aspect ratio Ge-on-Si waveguide platform for miniaturized mid-infrared applications Andrew W. K. Fong, Rachel C. F. Ang, Leh Woon Lim, Lennon Y. T. Lee, Qingxin Zhang, Doris K. T. Ng, Xianshu Luo, Landobasa Y. M. Tobing Integrated Optics: Devices, Materials, and Technologies XXVIII
12 Mar 2024 SERC Institute of Microelectronics SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, Qingxin Zhang MOEMS and Miniaturized Systems XXIII
11 Mar 2024 SERC Institute of Microelectronics Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society Doris K. T. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith W. Y. Koh, Linfang Xu, Kristel P. X. Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII
7 Feb 2024 SERC Institute of Microelectronics Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters Xinghua Wang, Chen Liu, Ying Zhang, Wenjia Yang, You Qian, Peng Liu, Zhan Jiang Quek, Yan Hong, Eugene Yi, Zhun Woo, Huamao Lin, Qingxin Zhang, Peter Hyun Kee Chang, Yao Zhu 2023 International Electron Devices Meeting (IEDM)
13 Mar 2023 SERC Institute of Microelectronics On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector Hong Cai, Md Hazwani Khairy, Rachel Ang, Linfang Xu, Doris Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee Silicon Photonics XVIII
26 Jan 2023 SERC Institute of Microelectronics An integrated MEMS thermal emitter with piezoelectric actuation Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. M. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Y. T. Lee MOEMS and Miniaturized Systems XXII
16 Jul 2021 SERC Institute of Microelectronics NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector Doris Keh Ting Ng, Chong Pei Ho, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin Jiaqiang Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Yao Ting Lee Sensors and Actuators B: Chemical
15 Mar 2021 SERC Institute of Microelectronics Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing Doris K. T. Ng, Chong-Pei Ho, Linfang Xu, Tantan Zhang, Li-Yan Siow, Eldwin J. Ng, Hong Cai, Qingxin Zhang, Lennon Y. T. Lee 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)