Search results

Publication date Communities Collections Article title Author(s) Journal/Conference
12 Mar 2024 SERC Institute of Microelectronics Scandium-doped aluminum nitride photonic integration platform Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. M. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. T. Ng, Lennon Y. T. Lee, Xianshu Luo SPIE Photonics West 2024
30 Jan 2024 SERC Institute of Microelectronics Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin, Yao Zhu Materials
12 Jan 2024 SERC Institute of Microelectronics Leakage Mechanism and Cycling Behavior of Ferroelectric Al0.7Sc0.3N Li Chen, Qiang Wang, Chen Liu, Minghua Li, Wendong Song, Weijie Wang, Desmond K. Loke, Yao Zhu Materials
7 Nov 2023 SERC Institute of Microelectronics Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d33,f and e31,f) in 100 nm-500 nm Sc0.3Al0.7N films Chen Liu, Binni Varghese, Patrick Peng Liu, Huamao Lin, Minghua Li, Yao Zhu 2023 IEEE International Ultrasonics Symposium (IUS)
9 Oct 2023 SERC Institute of Microelectronics Impact of Asymmetric Piezoelectricity of 100 nm Al0.7Sc0.3N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators Li Chen, Wenjia Yang, Chen Liu, Minghua Li, Nan Wang, Yao Zhu 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
29 Sep 2023 SERC Institute of Microelectronics Process Optimization of Sc0.2Al0.8N Bimorph Stack Deposition on 200mm Si Wafer Peng Liu, Minghua Li, Huamao Lin, Zhan Jiang Quek, Binni Varghese, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics The Effect of Molybdenum Grain Characteristics on Ferroelectric Al0.7Sc0.3N Film Properties Minghua Li, Huamao Lin, Binni Varghese, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices Zhan Jiang Quek, Yijun Lim, Minghua Li, Huamao Lin, Yan Hong 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film Subhranu Samanta, Chen Liu, Zichu Wang, Li Chen, Yao Zhu, Minghua Li, Binni Varghese, Huamao Lin, Hock Koon Lee 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Leakage Mechanism of Ferroelectric Al0.7Sc0.3N Ultra-thin Film Li Chen, Zichu Wang, Chen Liu, Minghua Li, Wendong Song, Weijie Wang, Binni Varghese, Hock Koon Lee, Huamao Lin, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)