Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters

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Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters
Title:
Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters
Journal Title:
2023 International Electron Devices Meeting (IEDM)
Publication Date:
07 February 2024
Citation:
Wang, X., Liu, C., Zhang, Y., Yang, W., Qian, Y., Liu, P., Quek, Z. J., Hong, Y., Yi, E., Woo, Z., Lin, H., Zhang, Q., Kee Chang, P. H., & Zhu, Y. (2023). Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters. 2023 International Electron Devices Meeting (IEDM), 8, 1–4. https://doi.org/10.1109/iedm45741.2023.10413706
Abstract:
In this work, 200 mm wafer-level 15 GHz bulk acoustic wave (BAW) resonators and filters have been demonstrated based on 90 nm thin Sc 0.2 Al 0.8 N film. The fabricated resonators have achieved an effective coupling coefficient of ~15% and a quality factor of over 200. The fabricated filters have demonstrated an insertion loss of ~ 3.5 dB and fractional bandwidth of ~ 10%, which is the highest among the reported acoustic filters at this frequency range. Further, circuit models with area-dependent parameters and embedded parasitics have been developed and calibrated for filter design. The promising results indicate the possibility of ScAlN-based BAW technology going beyond 10 GHz towards mmWave frequency filtering
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Science and Engineering Research Council of A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing
Grant Reference no. : A20G9b0135
Description:
© 2024 IEEE.  Personal use of this material is permitted.  Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISSN:
2156-017X
ISBN:
979-8-3503-2767-0
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