Citation:
Wang, X., Liu, C., Zhang, Y., Yang, W., Qian, Y., Liu, P., Quek, Z. J., Hong, Y., Yi, E., Woo, Z., Lin, H., Zhang, Q., Kee Chang, P. H., & Zhu, Y. (2023). Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters. 2023 International Electron Devices Meeting (IEDM), 8, 1–4. https://doi.org/10.1109/iedm45741.2023.10413706