Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters

Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters

2023 International Electron Devices Meeting (IEDM)

10.1109/IEDM45741.2023.10413706

http://dx.doi.org/10.1109/iedm45741.2023.10413706

Xinghua Wang, Chen Liu, Ying Zhang, Wenjia Yang, You Qian, Peng Liu, Zhan Jiang Quek, Yan Hong, Eugene Yi, Zhun Woo, Huamao Lin, Qingxin Zhang, Peter Hyun Kee Chang, Yao Zhu

Electrical and Electronic Engineering

07 February 2024

Wang, X., Liu, C., Zhang, Y., Yang, W., Qian, Y., Liu, P., Quek, Z. J., Hong, Y., Yi, E., Woo, Z., Lin, H., Zhang, Q., Kee Chang, P. H., & Zhu, Y. (2023). Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters. 2023 International Electron Devices Meeting (IEDM), 8, 1–4. https://doi.org/10.1109/iedm45741.2023.10413706

In this work, 200 mm wafer-level 15 GHz bulk acoustic wave (BAW) resonators and filters have been demonstrated based on 90 nm thin Sc 0.2 Al 0.8 N film. The fabricated resonators have achieved an effective coupling coefficient of ~15% and a quality factor of over 200. The fabricated filters have demonstrated an insertion loss of ~ 3.5 dB and fractional bandwidth of ~ 10%, which is the highest among the reported acoustic filters at this frequency range. Further, circuit models with area-dependent parameters and embedded parasitics have been developed and calibrated for filter design. The promising results indicate the possibility of ScAlN-based BAW technology going beyond 10 GHz towards mmWave frequency filtering

Publisher Copyright

This research / project is supported by the Science and Engineering Research Council of A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing
Grant Reference no. : A20G9b0135

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