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Publication date Communities Collections Article title Author(s) Journal/Conference
7 May 2024 SERC Institute of Microelectronics Monolithic Integration of ScAlN MEMS Filter on RFSOI Using ALD Al2O3 as VHF Barrier Xinghua Wang, Ying Zhang, Chen Liu, Eugene Yi Zhun Woo, Wenjia Yang, Nan Wang, Yao Zhu, Qingxin Zhang 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
7 May 2024 SERC Institute of Microelectronics Nonlinear Performance of Monolithically Integrated Scaln-Based Ghz Acoustic Filters With Rfsoi Switches Chen Liu, Ying Zhang, Xinghua Wang, Wenjia Yang, Eugene Yi Zhun Woo, Danlei Yan, Raja M. Kumarasamy, Nan Wang, Yao Zhu 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
7 Feb 2024 SERC Institute of Microelectronics Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters Xinghua Wang, Chen Liu, Ying Zhang, Wenjia Yang, You Qian, Peng Liu, Zhan Jiang Quek, Yan Hong, Eugene Yi, Zhun Woo, Huamao Lin, Qingxin Zhang, Peter Hyun Kee Chang, Yao Zhu 2023 International Electron Devices Meeting (IEDM)
7 Nov 2023 SERC Institute of Microelectronics A Sc0.2Al0.8N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications Chen Liu, Xinghua Wang, Wenjia Yang, Ying Zhang, Eugene Yi Zhun Woo, Yao Zhu 2023 IEEE International Ultrasonics Symposium (IUS)
7 Nov 2023 SERC Institute of Microelectronics De-embedding of Contact Pads Parasitics in RFMEMS resonators for 5G Applications Wenjia Yang, Chen Liu, Ying Zhang, Bhattacharya Shashwat, Xinghua Wang, Eugene Yi Zhun Woo, Yao Zhu 2023 IEEE International Ultrasonics Symposium (IUS)
7 Nov 2023 SERC Institute of Microelectronics Impact of In-Plane Residual Stress on The Performance of The Film Bulk Acoustic Resonators Bhattacharya Shashwat, Chen Liu, Wenjia Yang, Ying Zhang, Xinghua Wang, Eugene Woo Yi Zhun, Yao Zhu 2023 IEEE International Ultrasonics Symposium (IUS)
9 Oct 2023 SERC Institute of Microelectronics Piezoelectric MEMS for Frequency Control and Sensing Yao Zhu, Bhattacharya Shashwat, Wenjia Yang, Li Chen, Ying Zhang, Chen Liu 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
9 Oct 2023 SERC Institute of Microelectronics Impact of Asymmetric Piezoelectricity of 100 nm Al0.7Sc0.3N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators Li Chen, Wenjia Yang, Chen Liu, Minghua Li, Nan Wang, Yao Zhu 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)