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7 May 2024
SERC
Institute of Microelectronics
Monolithic Integration of ScAlN MEMS Filter on RFSOI Using ALD Al2O3 as VHF Barrier
Xinghua Wang,
Ying Zhang,
Chen Liu,
Eugene Yi Zhun Woo,
Wenjia Yang,
Nan Wang,
Yao Zhu,
Qingxin Zhang
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
7 May 2024
SERC
Institute of Microelectronics
Nonlinear Performance of Monolithically Integrated Scaln-Based Ghz Acoustic Filters With Rfsoi Switches
Chen Liu,
Ying Zhang,
Xinghua Wang,
Wenjia Yang,
Eugene Yi Zhun Woo,
Danlei Yan,
Raja M. Kumarasamy,
Nan Wang,
Yao Zhu
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
7 Feb 2024
SERC
Institute of Microelectronics
Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters
Xinghua Wang,
Chen Liu,
Ying Zhang,
Wenjia Yang,
You Qian,
Peng Liu,
Zhan Jiang Quek,
Yan Hong,
Eugene Yi,
Zhun Woo,
Huamao Lin,
Qingxin Zhang,
Peter Hyun Kee Chang,
Yao Zhu
2023 International Electron Devices Meeting (IEDM)
7 Nov 2023
SERC
Institute of Microelectronics
A Sc0.2Al0.8N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications
Chen Liu,
Xinghua Wang,
Wenjia Yang,
Ying Zhang,
Eugene Yi Zhun Woo,
Yao Zhu
2023 IEEE International Ultrasonics Symposium (IUS)
7 Nov 2023
SERC
Institute of Microelectronics
De-embedding of Contact Pads Parasitics in RFMEMS resonators for 5G Applications
Wenjia Yang,
Chen Liu,
Ying Zhang,
Bhattacharya Shashwat,
Xinghua Wang,
Eugene Yi Zhun Woo,
Yao Zhu
2023 IEEE International Ultrasonics Symposium (IUS)
7 Nov 2023
SERC
Institute of Microelectronics
Impact of In-Plane Residual Stress on The Performance of The Film Bulk Acoustic Resonators
Bhattacharya Shashwat,
Chen Liu,
Wenjia Yang,
Ying Zhang,
Xinghua Wang,
Eugene Woo Yi Zhun,
Yao Zhu
2023 IEEE International Ultrasonics Symposium (IUS)
9 Oct 2023
SERC
Institute of Microelectronics
Piezoelectric MEMS for Frequency Control and Sensing
Yao Zhu,
Bhattacharya Shashwat,
Wenjia Yang,
Li Chen,
Ying Zhang,
Chen Liu
2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
9 Oct 2023
SERC
Institute of Microelectronics
Impact of Asymmetric Piezoelectricity of 100 nm Al0.7Sc0.3N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators
Li Chen,
Wenjia Yang,
Chen Liu,
Minghua Li,
Nan Wang,
Yao Zhu
2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
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