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Publication date Communities Collections Article title Author(s) Journal/Conference
18 Feb 2025 SERC Institute of Microelectronics Up to 48 GHz mmWave Ferroelectric SC0.3Al0.7N Bulk Acoustic Wave Resonators and Filters Chen Liu, You Qian, Ying Zhang, Xinghua Wang, Minghua Li, Peng Liu, Huamao Lin, Qingxin Zhang, Yao Zhu 2024 IEEE International Electron Devices Meeting (IEDM)
14 May 2024 SERC Institute of Microelectronics 1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate Amy S. K. Tong, Wing Wai Chung, Charmaine Goh, Landobasa Y. M. Tobing, Leh Woon Lim, Yuriy A. Akimov, Zhan Jiang Quek, Aravind P. Anthur, Jia Sheng Goh, Huamao Lin, Navab Singh, Qingxin Zhang, Doris K. T. Ng Optical Fiber Communication Conference (OFC) 2024
7 May 2024 SERC Institute of Microelectronics In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array Mantalena Sarafianou, Daniel Ssu-Han Chen, David Sze Wai Choong, Duan Jian Goh, Jihang Liu, Srinivas Merugu, Qing Xin Zhang, Huamao Lin, Steven H. J. Lee, Peter H. K. Chang, Yee Lung Lee, Carlo L. Prelini, Filippo D’Ercoli, Dao Hao Sim, Alberto Leotti, Laura Castoldi, Domenico Giusti, Joshua E.-Y. Lee 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
12 Mar 2024 SERC Institute of Microelectronics Scandium-doped aluminum nitride photonic integration platform Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. M. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. T. Ng, Lennon Y. T. Lee, Xianshu Luo SPIE Photonics West 2024
7 Feb 2024 SERC Institute of Microelectronics Thin Sc0.2Al0.8N Film Based 15 GHz Wideband Filter: Towards mmWave Acoustic Filters Xinghua Wang, Chen Liu, Ying Zhang, Wenjia Yang, You Qian, Peng Liu, Zhan Jiang Quek, Yan Hong, Eugene Yi, Zhun Woo, Huamao Lin, Qingxin Zhang, Peter Hyun Kee Chang, Yao Zhu 2023 International Electron Devices Meeting (IEDM)
30 Jan 2024 SERC Institute of Microelectronics Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin, Yao Zhu Materials
7 Nov 2023 SERC Institute of Microelectronics Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d33,f and e31,f) in 100 nm-500 nm Sc0.3Al0.7N films Chen Liu, Binni Varghese, Patrick Peng Liu, Huamao Lin, Minghua Li, Yao Zhu 2023 IEEE International Ultrasonics Symposium (IUS)
29 Sep 2023 SERC Institute of Microelectronics Process Optimization of Sc0.2Al0.8N Bimorph Stack Deposition on 200mm Si Wafer Peng Liu, Minghua Li, Huamao Lin, Zhan Jiang Quek, Binni Varghese, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics The Effect of Molybdenum Grain Characteristics on Ferroelectric Al0.7Sc0.3N Film Properties Minghua Li, Huamao Lin, Binni Varghese, Yao Zhu 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
29 Sep 2023 SERC Institute of Microelectronics Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices Zhan Jiang Quek, Yijun Lim, Minghua Li, Huamao Lin, Yan Hong 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)