Liu, C., Zhang, Y., Wang, X., Qian, Y., Lin, H., Zhang, Q., & Zhu, Y. (2025). Experimental Insights of ScAlN-Based Switchable Resonator and Filter: Operation and Reliability. In (Editor), 2025 IEEE International Electron Devices Meeting (IEDM). https://doi.org/10.1109/iedm50572.2025.11353622
Abstract:
In this work, Sc0.3Al0.7N-based switchable bilayer film bulk acoustic resonators (FBAR) and filters exhibiting electrically switchable bands of 3 GHz and 6 GHz were fabricated and investigated. Four polarization configurations are examined to identify the layer(s) to switch for an optimal performance. A new methodology is proposed to reconfigure the ladder filters with only 2 switching steps. This approach was demonstrated on the fabricated 2-stage filters, achieving the switching between a 3 GHz passband with fractional bandwidth (FBW) of ~15% and a 6 GHz passband with FBW of 8%. Additionally, a thorough endurance analysis of the bilayer FBAR was performed to characterize changes in resonator performance and ferroelectric behavior over repeated cycling, and three dominant failure mechanisms were identified. Endurance of the bilayer FBAR can be improved up to 107 without breakdown by adopting a dynamic pulse-amplitude cycling scheme. This study provides insights into the operation, optimization, and long-term reliability of switchable ScAlN-based BAW devices.
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Funding Info:
There was no specific funding for the research done