Mantalena Sarafianou, Daniel Ssu-Han Chen, David Sze Wai Choong, Duan Jian Goh, Jihang Liu, Srinivas Merugu, Qing Xin Zhang, Huamao Lin, Steven H. J. Lee, Peter H. K. Chang, Yee Lung Lee, Carlo L. Prelini, Filippo D’Ercoli, Dao Hao Sim, Alberto Leotti, Laura Castoldi, Domenico Giusti and Joshua E.-Y. Lee, "In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array," 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kyoto, Japan, 2023, pp. 128-131.
Abstract:
This paper presents, for the first time, in-air long-range temperature sensing by ultrasound using a single Scandium-doped (15%) Aluminum Nitride (ScAlN) pMUT array. The proposed temperature pulse-echo sensing setup can achieve an impressive 97% accuracy (and a respective average absolute error of 1.4°C) in temperature sensing at 30cm (corresponding to 60cm of round-trip distance) for temperatures up to 90°C. This is accomplished using a single 9mm2 die without any signal pre/post-amplification with a range that could comfortably be extended to 1m.
License type:
Publisher Copyright
Funding Info:
This research was supported by A*STAR under “Piezo Specialty Lab-in-Fab” (Grant No. I1901E0050).