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1 Jun 2019 SERC Institute of Microelectronics Over 10% of k2eff Demonstrated by 2-GHz Spurious Mode-Free Sc0.12Al0.88N Laterally Coupled Alternating Thickness Mode Resonators Nan Wang, Yao Zhu, Geng Li Chua, Bangtao Chen, Srinivas Merugu, Navab Singh, Yuandong Gu
30 May 2017 SERC Institute of Microelectronics High-band AlN Based RF-MEMS Resonator for TSV integration Srinivas Merugu, Mingbin Yu, Gengli Chua, Nan Wang, Yao Zhu, Chengliang Sun
1 Oct 2016 SERC Institute of Microelectronics A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application Yao Zhu, Nan Wang, Chengliang Sun, Srinivas Merugu, Navab Singh, Yuandong Gu
8 Jul 2016 SERC Institute of Microelectronics GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers Chengliang Sun, Guoqiang Wu, Yao Zhu, Srinivas Merugu, Nan Wang, Yuandong Gu
9 Jun 2015 SERC Institute of Microelectronics A Robust Bilayer Cap in Thin Film Encapsulation for MEMS Device Application Jaibir Sharma, Jae-Wung Lee, Srinivas Merugu, Navab Singh
15 May 2015 SERC Institute of Microelectronics Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS Jae-Wung Lee, Jaibir Sharma, Margarita Sofia Narducci, Srinivas Merugu, Xiao Lin Zhang, Singh Navab
12 Jan 2015 SERC Institute of Microelectronics Polymeric C-shaped cuff electrode for recording of peripheral nerve signal Ning Xue, Tao Sun, Wei Mong Tsang, Ignacio Delgado-Martinez, Sang-Hoon Lee, Swathi Sheshadri, Zhuolin Xiang, Srinivas Merugu, Yuandong Gu, Shih-Cheng Yen, Nitish V. Thakor
1 Aug 2014 SERC Institute of Microelectronics Robust Pop-Up Shape Encapsulation Using Dual-Sealing Jae-Wung Lee, Jaibir Sharma, Srinivas Merugu, Navab Singh
27 Sep 2013 SERC Institute of Microelectronics Improving aluminum nitride plasma etch process for MEMS applications Vladimir Bliznetsov, Badrul Hisam Bin Johari, Mohamed Tahar Chentir, Wei Hong Li, Lai Yin Wong, Srinivas Merugu, Xiao Lin Zhang, Navab Singh