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29 Oct 2021
SERC
Institute of Microelectronics
Aluminum Nitride Photonics Platforms on Silicon Substrate
Nanxi Li,
Chong Pei Ho,
Yanmei Cao,
Shiyang Zhu,
George. F. C Chen,
Yuan Hsing Fu,
Yao Zhu,
Dawn T. H. Tan,
Lennon Y. T. Lee
2021 Conference on Lasers and Electro-Optics (CLEO)
15 Mar 2021
SERC
Institute of Microelectronics
Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
Doris K. T. Ng,
Chong-Pei Ho,
Linfang Xu,
Tantan Zhang,
Li-Yan Siow,
Eldwin J. Ng,
Hong Cai,
Qingxin Zhang,
Lennon Y. T. Lee
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
15 Mar 2021
SERC
Institute of Microelectronics
Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride
Doris K. T. Ng,
Tantan Zhang,
Li-Yan Siow,
Linfang Xu,
Chong-Pei Ho,
Hong Cai,
Lennon Y. T. Lee,
Qingxin Zhang,
Navab Singh
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
4 Mar 2021
SERC
Institute of Microelectronics
Photonic crystal MEMS emitter for chemical gas sensing
Nanxi Li,
Qin Chao,
Zhonghua Gu,
Shiwei Song,
Yanyan Zhou,
Shaonan Zheng,
Linfang Xu,
Yun Da Chua,
Qingxin Zhang,
Hong Cai,
Daohua Zhang,
Qi Jie Wang,
Lennon Y. T. Lee
MOEMS and Miniaturized Systems XX
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