On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Silicon Photonics XVIII

10.1117/12.2650363

http://dx.doi.org/10.1117/12.2650363

Hong Cai, Md Hazwani Khairy, Rachel Ang, Linfang Xu, Doris Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

13 March 2023

Cai, H., Khairy, M. H., Ang, R., Xu, L., Ng, D., Li, N., Gu, Z., Kong, A., Chen, W., Seit, W. W., Ching, E. W. L., Jaafar, N., Wang, H., Tobing, L. Y. M., Lim, L. W., Zhang, Q., & Lee, L. Y. T. (2023). On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector. In G. T. Reed & A. P. Knights (Eds.), Silicon Photonics XVIII. SPIE. https://doi.org/10.1117/12.2650363

A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermalemitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for massdeployment of gas sensors in environmental sensing networks.

Publisher Copyright

This research / project is supported by the Agency for Science, Technology and Research - IAF-PP - Novel PAT Sensors
Grant Reference no. : A19B3a0008

This research / project is supported by the Agency for Science, Technology and Research - IAF-PP - Integrated Photonics Based Gas Sensor
Grant Reference no. : A1789a0024

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https://oar.a-star.edu.sg/communities-collections/articles/20217

Institute of Microelectronics