Search results

Publication date Communities Collections Article title Author(s) Journal/Conference
12 Mar 2024 SERC Institute of Microelectronics SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, Qingxin Zhang MOEMS and Miniaturized Systems XXIII
11 Mar 2024 SERC Institute of Microelectronics Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society Doris K. T. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith W. Y. Koh, Linfang Xu, Kristel P. X. Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII
13 Mar 2023 SERC Institute of Microelectronics On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector Hong Cai, Md Hazwani Khairy, Rachel Ang, Linfang Xu, Doris Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee Silicon Photonics XVIII
26 Jan 2023 SERC Institute of Microelectronics An integrated MEMS thermal emitter with piezoelectric actuation Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. M. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Y. T. Lee MOEMS and Miniaturized Systems XXII
16 Jul 2021 SERC Institute of Microelectronics NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector Doris Keh Ting Ng, Chong Pei Ho, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin Jiaqiang Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Yao Ting Lee Sensors and Actuators B: Chemical
15 Mar 2021 SERC Institute of Microelectronics Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing Doris K. T. Ng, Chong-Pei Ho, Linfang Xu, Tantan Zhang, Li-Yan Siow, Eldwin J. Ng, Hong Cai, Qingxin Zhang, Lennon Y. T. Lee 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
15 Mar 2021 SERC Institute of Microelectronics Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride Doris K. T. Ng, Tantan Zhang, Li-Yan Siow, Linfang Xu, Chong-Pei Ho, Hong Cai, Lennon Y. T. Lee, Qingxin Zhang, Navab Singh 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
4 Mar 2021 SERC Institute of Microelectronics Photonic crystal MEMS emitter for chemical gas sensing Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Y. T. Lee MOEMS and Miniaturized Systems XX
4 Mar 2021 SERC Institute of Microelectronics Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides Shaonan Zheng, Helen Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Lee Integrated Optics: Devices, Materials, and Technologies XXV
17 Aug 2020 SERC Institute of Microelectronics Considerations for an 8-inch Wafer-level CMOS compatible AlN Pyroelectric 5-14 um wavelength IR detector towards miniature integrated photonics gas sensors Doris K. T. Ng, Guoqiang Wu, Tan-Tan Zhang, Linfang Xu, Jianbo Sun, Wing-Wai Chung, Hong Cai, Qingxin Zhang, Navab Singh IEEE Xplore