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11 Mar 2024
SERC
Institute of Microelectronics
Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society
Doris K. T. Ng,
Weiguo Chen,
Huanhuan Wang,
Zhonghua Gu,
Md Hazwani Khairy Md Husni,
Isabel Judith W. Y. Koh,
Linfang Xu,
Kristel P. X. Wee,
Chong Pei Ho,
Jia Sheng Goh,
Qingxin Zhang
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII
13 Mar 2023
SERC
Institute of Microelectronics
On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector
Hong Cai,
Md Hazwani Khairy,
Rachel Ang,
Linfang Xu,
Doris Ng,
Nanxi Li,
Zhonghua Gu,
Anmin Kong,
Weiguo Chen,
Wen Wei Seit,
Eva Wai Leong Ching,
Norhanani Jaafar,
Huanhuan Wang,
Landobasa Y.M. Tobing,
Leh Woon Lim,
Qingxin Zhang,
Lennon Yao Ting Lee
Silicon Photonics XVIII
12 Nov 2021
SERC
Institute of Microelectronics
Piezoelectric over Silicon-on-Nothing (pSON) process
Jaibir Sharma,
Duan Jian Goh,
Srinivas Merugu,
Yul Koh,
Sagnik Ghosh,
Md Hazwani Khairy,
Eldwin Jiaqiang Ng
2021 IEEE International Ultrasonics Symposium (IUS)
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