Xu, L., Ng, D. K. T., Chen, W., Li, N., Ho, C. P., Goh, D. J., Zhang, Y., Zhang, Q., & Lee, L. Y. T. (2023). Low-power contactless button system based on MEMS ScAlN pyroelectric detector. In W. Piyawattanametha, Y.-H. Park, H. Zappe (Eds.), MOEMS and Miniaturized Systems XXII (p. 4). SPIE. https://doi.org/10.1117/12.2648806
Abstract:
We demonstrate a system-level low-power contactless button using MEMS ScAlN-based pyroelectric detector. As pyroelectric detectors can sense instantaneous temperature change, the human finger can act as a thermal source to activate the button. Using our in-house fabricated ScAlN-based pyroelectric detector which does not require any IR source, we package it into a contactless button system designed with electrical read-out circuits and signal processing. This contactless button system could detect the presence of a finger at a center distance measured up to ~4 cm away, ~2 cm radius circle area, suitable for application as contactless elevator button. Our contactless button system using ScAlN-based pyroelectric effect is characterized, tested and compared with a commercial contactless button. The power consumed is measured ~3.5× lower than that of commercial contactless button. The results obtained provide a potential solution towards energy efficient low-power contactless button system.
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Funding Info:
This research / project is supported by the Agency for Science, Technology and Research - Low-Carbon Energy Research (LCER) Funding Initiative
Grant Reference no. : U2102d2012
This research / project is supported by the Agency for Science, Technology and Research - RIE2020 Advanced Manufacturing and Engineering (AME) Industry Alignment Fund - Pre-Positioning Grant
Grant Reference no. : A1789a0024
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