| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 1 Dec 2022 | SERC | Institute of Microelectronics | Oxidation of sputtered AlScN films exposed to the atmosphere | Minghua Li, Kan Hu, Huamao Lin, Valery Felmetsger, Yao Zhu | 2022 IEEE International Ultrasonics Symposium (IUS) |
| 15 Sep 2022 | SERC | Institute of Microelectronics | Oxide overlayer formation on sputtered ScAlN film exposed to air | Minghua Li, Huamao Lin, Kan Hu, Yao Zhu | Applied Physics Letters |
| 2 Sep 2022 | SERC | Institute of Microelectronics | Texture evolution of ferroelectric AlScN films on metal under-layers | Minghua Li, Huamao Lin, Ping Luo, Kan Hu, Chen Liu, Li Chen, Yao Zhu | 2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF) |
| 13 Nov 2021 | SERC | Institute of Microelectronics | Structural characterization of the abnormal grains evolution in sputtered ScAlN films | Minghua Li, Kan Hu, Huamao Lin, Yao Zhu | 2021 IEEE International Ultrasonics Symposium (IUS) |