Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
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13 Nov 2021 | SERC | Institute of Microelectronics | Structural characterization of the abnormal grains evolution in sputtered ScAlN films | Minghua Li, Kan Hu, Huamao Lin, Yao Zhu | 2021 IEEE International Ultrasonics Symposium (IUS) |