Texture evolution of ferroelectric AlScN films on metal under-layers

Texture evolution of ferroelectric AlScN films on metal under-layers

2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF)

10.1109/ISAF51494.2022.9870108

https://doi.org/10.1109/isaf51494.2022.9870108

Minghua Li, Huamao Lin, Ping Luo, Kan Hu, Chen Liu, Li Chen, Yao Zhu

02 September 2022

Li, M., Lin, H., Luo, P., Hu, K., Liu, C., Chen, L., & Zhu, Y. (2022). Texture evolution of ferroelectric AlScN films on metal under-layers. 2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF), 1–3. https://doi.org/10.1109/isaf51494.2022.9870108

Ferroelectric domain structure and the polarity inversion highly depend on the thin film texture. In this study, we deposited the AlScN films on various metal under-layers, and evaluated their microstructure. On the bottom metal surface, the initial AlScN exhibits poorer texture. When the film grows thicker, the grains become bigger and their orientation aligns better. The scandium concentration and the under metals properties play important roles for the initial AlScN layer formation. Two-stage texture evolution is proposed to understand the AlScN film growth, as well as the impacts of the scandium doping concentration and the metal under-layers.

Publisher Copyright

This research / project is supported by the Science and Engineering Research Council of A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing
Grant Reference no. : A20G9b0135

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2375-0448

Institute of Microelectronics