Photonic crystal MEMS emitter for chemical gas sensing

Photonic crystal MEMS emitter for chemical gas sensing

MOEMS and Miniaturized Systems XX

10.1117/12.2581358

http://dx.doi.org/10.1117/12.2581358

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Y. T. Lee

04 March 2021

Li, N., Chao, Q., Gu, Z., Song, S., Zhou, Y., Zheng, S., Xu, L., Chua, Y. D., Zhang, Q., Cai, H., Zhang, D., Wang, Q. J., & Lee, L. Y. T. (2021). Photonic crystal MEMS emitter for chemical gas sensing. MOEMS and Miniaturized Systems XX. https://doi.org/10.1117/12.2581358

A thermal emitter fabricated on complementary metal-oxide-semiconductor (CMOS)-compatible facilities is a key component for low-cost mid-infrared gas sensing. While conventional thermal emitters have broad spectrum and wide emission angle, which limit the sensing performance. In this work, a microelectromechanical system (MEMS)-based thermal emitter with photonic crystal has been designed and fabricated using CMOS-compatible technology. The photonic crystal enables the emission wavelength selectivity within mid-infrared regime. By engineering photonic crystal dimension, the emission enhancement wavelength can be matched to the fingerprint wavelength of chemical gas for efficient chemical gas sensing purpose.

Publisher Copyright

This research / project is supported by the A*STAR - IAF-PP
Grant Reference no. : A1789a0024

This research / project is supported by the A*STAR - IAF-PP
Grant Reference no. : A19B3a0008

This research / project is supported by the National Research Foundation - Competitive Research Program
Grant Reference no. : NRF-CRP18-2017-02

https://oar.a-star.edu.sg/communities-collections/articles/18792

116970M

Institute of Microelectronics