Citation:
Li, N., Chao, Q., Gu, Z., Song, S., Zhou, Y., Zheng, S., Xu, L., Chua, Y. D., Zhang, Q., Cai, H., Zhang, D., Wang, Q. J., & Lee, L. Y. T. (2021). Photonic crystal MEMS emitter for chemical gas sensing. MOEMS and Miniaturized Systems XX. https://doi.org/10.1117/12.2581358