Photonic crystal MEMS emitter for chemical gas sensing

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Photonic crystal MEMS emitter for chemical gas sensing
Title:
Photonic crystal MEMS emitter for chemical gas sensing
Journal Title:
MOEMS and Miniaturized Systems XX
Keywords:
Publication Date:
04 March 2021
Citation:
Li, N., Chao, Q., Gu, Z., Song, S., Zhou, Y., Zheng, S., Xu, L., Chua, Y. D., Zhang, Q., Cai, H., Zhang, D., Wang, Q. J., & Lee, L. Y. T. (2021). Photonic crystal MEMS emitter for chemical gas sensing. MOEMS and Miniaturized Systems XX. https://doi.org/10.1117/12.2581358
Abstract:
A thermal emitter fabricated on complementary metal-oxide-semiconductor (CMOS)-compatible facilities is a key component for low-cost mid-infrared gas sensing. While conventional thermal emitters have broad spectrum and wide emission angle, which limit the sensing performance. In this work, a microelectromechanical system (MEMS)-based thermal emitter with photonic crystal has been designed and fabricated using CMOS-compatible technology. The photonic crystal enables the emission wavelength selectivity within mid-infrared regime. By engineering photonic crystal dimension, the emission enhancement wavelength can be matched to the fingerprint wavelength of chemical gas for efficient chemical gas sensing purpose.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - IAF-PP
Grant Reference no. : A1789a0024

This research / project is supported by the A*STAR - IAF-PP
Grant Reference no. : A19B3a0008

This research / project is supported by the National Research Foundation - Competitive Research Program
Grant Reference no. : NRF-CRP18-2017-02
Description:
ISSN:
116970M
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