GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

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GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers
Title:
GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers
Other Titles:
Applied Physics Letters
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Publication Date:
08 July 2016
Citation:
Appl. Phys. Lett. 109, 013506 (2016)
Abstract:
This letter reports a spurious mode free GHz aluminum nitride (AlN) lamb wave resonator (LWR) towards high figure of merit (FOM). One dimensional gourd-shape phononic crystal (PnC) tether with large phononic bandgaps is employed to reduce the acoustic energy dissipation into the substrate. The periodic PnC tethers are based on a 1 lm-thick AlN layer with 0.26 lm-thick Mo layer on top. A clean spectrum over a wide frequency range is obtained from the measurement, which indicates a wide-band suppression of spurious modes. Experimental results demonstrate that the fabricated AlN LWR has an insertion loss of 5.2 dB and a loaded quality factor (Q) of 1893 at 1.02 GHz measured in air. An impressive ratio of the resistance at parallel resonance (Rp) to the resistance at series resonance (Rs) of 49.8 dB is obtained, which is an indication of high FOM for LWR. The high Rp to Rs ratio is one of the most important parameters to design a radio frequency filter with steep roll-off.
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ISSN:
1077-3118
0003-6951
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