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15 Mar 2021
SERC
Institute of Microelectronics
Wafer-Scale Encapsulated Saw Temperature and Pressure Sensors for Harsh Environments
Eldwin J. Ng,
Jaibir Sharma,
Eva Wai Leong Ching,
Guoqiang Wu,
Didier Pohl,
Olivier Vancauwenberghe
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
17 Aug 2020
SERC
Institute of Microelectronics
Considerations for an 8-inch Wafer-level CMOS compatible AlN Pyroelectric 5-14 um wavelength IR detector towards miniature integrated photonics gas sensors
Doris K. T. Ng,
Guoqiang Wu,
Tan-Tan Zhang,
Linfang Xu,
Jianbo Sun,
Wing-Wai Chung,
Hong Cai,
Qingxin Zhang,
Navab Singh
IEEE Xplore
1 Apr 2018
SERC
Institute of Microelectronics
Wafer-Level Vacuum-Packaged High Performance AlN-on-SOI Piezoelectric Resonator for Sub-100 MHz Oscillator Applications
Guoqiang Wu,
Jinghui Xu,
Xiaolin Zhang,
Nan Wang,
Danlei Yan,
Jayce Lay Keng Lim,
Yao Zhu,
Wei Li,
Yuandong Gu
IEEE Transactions on Industrial Electronics
25 Mar 2017
SERC
Institute of Microelectronics
A dual-mass fully decoupled MEMS gyroscope with wide bandwidthand high linearity
Guoqiang Wu,
Geng Li Chua,
Yuandong Gu
Sensors and Actuators A: Physical
8 Jul 2016
SERC
Institute of Microelectronics
GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers
Chengliang Sun,
Guoqiang Wu,
Yao Zhu,
Srinivas Merugu,
Nan Wang,
Yuandong Gu
Applied Physics Letters
20 May 2016
SERC
Institute of Microelectronics
Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform
Nan Wang,
Jinghui Xu,
Xiaolin Zhang,
Guoqiang Wu,
Yao Zhu,
Wei Li,
Alex Yuandong Gu
Journal of Micromechanics and Microengineering
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