| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 1 Dec 2022 | SERC | Institute of Microelectronics | Oxidation of sputtered AlScN films exposed to the atmosphere | Minghua Li, Kan Hu, Huamao Lin, Valery Felmetsger, Yao Zhu | 2022 IEEE International Ultrasonics Symposium (IUS) |