N. Li et al., "Aluminum Nitride Photonics Platforms on Silicon Substrate," 2021 Conference on Lasers and Electro-Optics (CLEO), 2021
Abstract:
The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Science and Engineering Research Council (SERC) - IAF-PP-2020
Grant Reference no. : A19B3a0008