Aluminum Nitride Photonics Platforms on Silicon Substrate

Aluminum Nitride Photonics Platforms on Silicon Substrate

2021 Conference on Lasers and Electro-Optics (CLEO)

https://ieeexplore.ieee.org/document/9571749

Nanxi Li, Chong Pei Ho, Yanmei Cao, Shiyang Zhu, George. F. C Chen, Yuan Hsing Fu, Yao Zhu, Dawn T. H. Tan, Lennon Y. T. Lee

aluminum nitride photonics platforms , silicon substrate , Institute of Microelectronics , nonlinear index , photonics devices , CMOS-compatible photonics , AlN , Si

29 October 2021

N. Li et al., "Aluminum Nitride Photonics Platforms on Silicon Substrate," 2021 Conference on Lasers and Electro-Optics (CLEO), 2021

The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.

Publisher Copyright

This research / project is supported by the Science and Engineering Research Council (SERC) - IAF-PP-2020
Grant Reference no. : A19B3a0008

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https://oar.a-star.edu.sg/communities-collections/articles/18424

978-1-943580-91-0

Institute of Microelectronics