Aluminum Nitride Photonics Platforms on Silicon Substrate

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Aluminum Nitride Photonics Platforms on Silicon Substrate
Title:
Aluminum Nitride Photonics Platforms on Silicon Substrate
Journal Title:
2021 Conference on Lasers and Electro-Optics (CLEO)
DOI:
Publication Date:
29 October 2021
Citation:
N. Li et al., "Aluminum Nitride Photonics Platforms on Silicon Substrate," 2021 Conference on Lasers and Electro-Optics (CLEO), 2021
Abstract:
The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Science and Engineering Research Council (SERC) - IAF-PP-2020
Grant Reference no. : A19B3a0008
Description:
© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISBN:
978-1-943580-91-0
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