| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 7 May 2024 | SERC | Institute of Microelectronics | Monolithic Integration of ScAlN MEMS Filter on RFSOI Using ALD Al2O3 as VHF Barrier | Xinghua Wang, Ying Zhang, Chen Liu, Eugene, Yi Zhun Woo, Wenjia Yang, Nan Wang, Yao Zhu, Qingxin Zhang | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |