Environmental influences on NDIR CO2 gas sensor using 20% ScAlN-based pyroelectric detector chip

Environmental influences on NDIR CO2 gas sensor using 20% ScAlN-based pyroelectric detector chip

Sensors and Actuators B: Chemical

10.1016/j.snb.2025.137843

https://doi.org/10.1016/j.snb.2025.137843

Doris Keh Ting Ng, William Provenaz, Jia Sheng Goh, Kristel Pei Xuan Wee, Zhonghua Gu, Huanhuan Wang, Md Hazwani Khairy Md Husni, Norhanani Jaafar, Linfang Xu, Weiguo Chen, Chong Pei Ho, Qingxin Zhang

Genetics and Molecular Biology, pyroelectric detector, scandium aluminum nitride

21 April 2025

Ng, D. K. T., Provenaz, W., Goh, J. S., Wee, K. P. X., Gu, Z., Wang, H., Husni, M. H. K. M., Jaafar, N., Xu, L., Chen, W., Ho, C. P., & Zhang, Q. (2025). Environmental influences on NDIR CO2 gas sensor using 20% ScAlN-based pyroelectric detector chip. Sensors and Actuators B: Chemical, 137843. https://doi.org/10.1016/j.snb.2025.137843

CO2 gas sensors are adopted in various manufacturing industries, medical sectors and also for indoor air quality measurement. Their functions range from concentration monitoring for product quality to detecting hazardous levels for safety. Having a robust CO2 gas sensor is important, but these sensors can be affected by temperature and humidity in the environment. Here we demonstrate an NDIR CO2 gas sensor based on 20% ScAlN-based pyroelectric detector chip, tested under different environmental conditions. Despite absolute signal output drop when surrounding temperatures increase, measured results show that CO2 gas response remains the same. Moreover, relative humidity (RH) does not seem to have much effect on the response of this NDIR CO2 gas sensor. Response times stay at ~1-2 s despite changes in environmental conditions. This sensor is also tested continuously for 100 hours to observe its signal variation over long hours. We note signal variation of ~±0.44% during the first 40 hours with subsequent variation increase to ~±1.7% at the 50th hour. Robustness of CO2 gas sensing with 20% ScAlN-based pyroelectric detector chip is also observed by measuring the gas responses of 5 detector chips obtained from 5 different locations within an 8-inch wafer, measuring CO2 gas sensing performance uniformity ~0.48% within an 8-inch wafer. The results obtained will allow us to have further insights and understanding on the potential and practicality of NDIR gas sensors based on 20% ScAlN-based pyroelectric detectors when subjected to different environmental conditions.

Attribution 4.0 International (CC BY 4.0)

This research / project is supported by the National Research Foundation, Singapore and Agency for Science, Technology and Research - Low-Carbon Energy Research (LCER) Funding Initiative (FI)
Grant Reference no. : U2102d2012

This research / project is supported by the National Research Foundation, Singapore and Agency for Science, Technology and Research - Low-Carbon Energy Research (LCER) Phase 2
Grant Reference no. : U2303D4001

© 2025 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).

https://oar.a-star.edu.sg/communities-collections/articles/21702

0925-4005

Institute of Microelectronics

https://www.sciencedirect.com/science/article/pii/S0925400525006185?via%3Dihub