1D Line-scan Metalens Integrated with MEMS Actuator for Depth Sensing Applications

Page view(s)
34
Checked on Sep 10, 2025
1D Line-scan Metalens Integrated with MEMS Actuator for Depth Sensing Applications
Please use this identifier to cite or link to this item: https://oar.a-star.edu.sg/communities-collections/articles/21368
Title:
1D Line-scan Metalens Integrated with MEMS Actuator for Depth Sensing Applications
Journal Title:
Conference on Lasers and Electro-Optics 2024
DOI:
10.1364/CLEO_SI.2024.SF2J.6
Publication URL:
http://dx.doi.org/10.1364/cleo_si.2024.sf2j.6
Authors:
Yuan Hsing Fu, Roberto Carminati, Huanhuan Wang, Leh Woon Lim, Narak Choi, Keng Heng Lai, Charmaine Shuyan Goh, Yat Fung Tsang, Navab Singh, Qingxin Zhang
Keywords:
Publication Date:
18 September 2024
Citation:
Fu, Y. H., Carminati, R., Wang, H., Lim, L. W., Choi, N., Lai, K. H., Goh, C. S., Tsang, Y. F., Singh, N., Zhang, Q. (2024). 1D Line-scan Metalens Integrated with MEMS Actuator for Depth Sensing Applications. CLEO 2024, SF2J.6. https://doi.org/10.1364/cleo_si.2024.sf2j.6
Abstract:
A 1D line-scan metalens integrated MEMS actuator with a field-of-view 80° × 60° has been demonstrated as proof-of-concept. This metalens integrated MEMS actuator shows promise as a compact optical module for depth sensing applications.
License type:
Publisher Copyright
Funding Info:
There was no specific funding for the research done
Description:
© 2024 Optica Publishing Group. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
URI:
https://oar.a-star.edu.sg/communities-collections/articles/21368
ISBN:
978-1-957171-39-5
Collections:
Institute of Microelectronics
Files uploaded:

Manuscripts in This Item:
File Size Format Action
2024-1d-line-scan-metalens-integrated-with-mems-actuator-for-depth-sensing-applications.pdf 341.63 KB PDF Request a copy