Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
15 Mar 2023 | SERC | Institute of Microelectronics | Model-based optical proximity correction for immersion lithography-based flat optics platform | Narak Choi, Keng Heng Lai, Arvind Sundaram, Navab Singh, Yuan Hsing Fu, Lennon Yao Ting Lee | High Contrast Metastructures XII |