Long-Range Ultrasound Wake-Up Receiver Using Pzt-Scaln Hybrid Pmut Link With Exponential Horn

Long-Range Ultrasound Wake-Up Receiver Using Pzt-Scaln Hybrid Pmut Link With Exponential Horn

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

10.1109/MEMS58180.2024.10439361

http://dx.doi.org/10.1109/mems58180.2024.10439361

Shyam Trivedi, Duan J. Goh, Weiguo Chen, Wei D. Toh, Jun Zhang, Sagnik Ghosh, Domenico Giusti, Alberto Leotti, Huan C. Chan, Goutham Koppisetti, Yao Zhang, Yuan Gao, Joshua E.-Y. Lee, Yul Koh

22 February 2024

Trivedi, S., Goh, D. J., Chen, W., Toh, W. D., Zhang, J., Ghosh, S., Giusti, D., Leotti, A., Chan, H. C., Koppisetti, G., Zhang, Y., Gao, Y., Lee, J. E.-Y., & Koh, Y. (2024, January 21). Long-Range Ultrasound Wake-Up Receiver Using Pzt-Scaln Hybrid Pmut Link With Exponential Horn. 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/mems58180.2024.10439361

This work presents a novel long-range acoustic wake-up receiver (WuRX) enhanced with an exponential horn, utilizing hybrid piezoelectric micromachined ultrasonic transducers (PMUTs) in a pitch-catch configuration. The transmitter (TX) employs a lead zirconate titanate (PZT) PMUT, while the receiver (RX) uses a 20% scandium-doped aluminum nitride (ScAlN) PMUT. Without the horn attachment, the system achieves a peak-to-peak received voltage of more than 25 mV at 95 cm. An exponential horn with a 30 mm mouth diameter, affixed to the RX, offers a voltage gain of approximately 6-8 dB over distances ranging from 50 to 90 cm. These findings are vital for Internet of Things (IoT) applications, as they demonstrate the successful reception of an On-Off-Keying (OOK) signal for the first time in a hybrid PMUT TX-RX link configuration, achieving distances of up to 70 cm with a data rate of 800 b/s and at carrier frequency exceeding 100 kHz. Furthermore, the received signal has a Signal-to-Noise Ratio (SNR) > 30 dB at 70 cm, establishing a working distance limit of 1.2 m.

Publisher Copyright

This research / project is supported by the A*STAR - Piezo Specialty Lab-in-a-Fab
Grant Reference no. : I1901E0050

This research / project is supported by the A*STAR - Nanosystems at the Edge
Grant Reference no. : A18A4b0055

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2160-1968

Institute of Microelectronics