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18 Dec 2024 SERC Institute of Microelectronics Low-Vacuum Sensing With Silicon-On-Nothing Resonating Membrane Daniel Ssu-Han Chen, Jihang Liu, David Sze Wai Choong, Duan Jian Goh, Sagnik Ghosh, Jaibir Sharma, Yul Koh 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)