Chen, D. S.-H., Liu, J., Choong, D. S. W., Goh, D. J., Ghosh, S., Sharma, J., & Koh, Y. (2024). Low-Vacuum Sensing With Silicon-On-Nothing Resonating Membrane. 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 1–4. https://doi.org/10.1109/uffc-js60046.2024.10794055
Abstract:
This paper presents a novel piezoelectric over silicon-on-nothing (PSON) membrane resonator for highly sensitive low-vacuum detection. Conventional piezoresistive sensors, primarily designed for positive pressure sensing, face limitations in vacuum applications due to assembly-induced stress, temperature variations, and outgassing errors. The proposed device addresses these challenges by integrating a piezoelectric Sc-doped AlN film on a silicon membrane suspended over a vacuum cavity. The frequency response of the membrane was characterized across a pressure range from atmospheric pressure down to 69.35 mbar, under varying DC bias conditions. Results show that applying a -40 V DC bias enhances sensitivity, with a frequency shift of -61 Hz/mbar (-64.1 ppm/mbar), due to increased membrane compressive relaxation. This PSON-based sensor demonstrates superior accuracy, miniaturization potential, and robustness for low-vacuum applications, making it a promising alternative for industries such as semiconductor manufacturing, aviation, and medical devices.
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Funding Info:
This research / project is supported by the Agency for Science, Technology and Research - GAP fund: Miniaturized Flow Control Module for Semiconductor Equipment
Grant Reference no. : I24D1AG009
This research / project is supported by the Agency for Science, Technology and Research - Advanced Manufacturing and Engineering Programmatic fund: Nanosystems at the Edge
Grant Reference no. : A18A4b0055