Investigation of the BAW-like Coupled Bulk Acoustic Resonators (CBAR) and Method to Further Improve the Coupling Coefficient

Investigation of the BAW-like Coupled Bulk Acoustic Resonators (CBAR) and Method to Further Improve the Coupling Coefficient

2022 IEEE International Ultrasonics Symposium (IUS)

10.1109/IUS54386.2022.9958315

https://doi.org/10.1109/ius54386.2022.9958315

Chen Liu, Xinghua Wang, Eugene Woo Yi Zhun, Yao Zhu, Nan Wang

01 December 2022

Liu, C., Wang, X., Zhun, E. W. Y., Zhu, Y., & Wang, N. (2022). Investigation of the BAW-like Coupled Bulk Acoustic Resonators (CBAR) and Method to Further Improve the Coupling Coefficient. 2022 IEEE International Ultrasonics Symposium (IUS), 1–3. https://doi.org/10.1109/ius54386.2022.9958315

A thickness and lateral mode coupled film acoustic resonator (CBAR) with k 2 eff comparable to the FBAR has been proposed and demonstrated previously. This paper further systematically investigate the impact of the design parameters on the resonant frequency and k 2 eff of this CBAR structure. A method to further improve the k 2 eff by filling the finger gaps with dielectric material is also proposed.

Publisher Copyright

This research / project is supported by the Science and Engineering Research Council of A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing
Grant Reference no. : A20G9b0135

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1948-5727

Institute of Microelectronics