A Study on PVD PZT and Sc0.2Al0.8N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance

A Study on PVD PZT and Sc0.2Al0.8N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

10.1109/UFFC-JS60046.2024.10793916

https://doi.org/10.1109/uffc-js60046.2024.10793916

David Sze Wai Choong, Daniel Ssu-Han Chen, Mantalena Sarafianou, Duan Jian Goh, Jihang Liu, Srinivas Merugu, Sagnik Ghosh, Prakasha Ramegowda, Qing Xin Zhang, Peter Chang, Joshua En-Yuan Lee, Jason Jia, Alberto Leotti, Luigi Baretta, Domenico Giusti, Alessandro Savoia, Yul Koh

Electrical and Electronic Engineering, utlrasound, series, parallel, pzt, ScAlN, electrical connection

18 December 2024

Wai Choong, D. S., Ssu-Han Chen, D., Sarafianou, M., Goh, D. J., Liu, J., Merugu, S., Ghosh, S., Ramegowda, P., Zhang, Q. X., Chang, P., Lee, J. E.-Y., Jia, J., Leotti, A., Baretta, L., Giusti, D., Savoia, A., & Koh, Y. (2024). A Study on PVD PZT and Sc0.2Al0.8N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance. 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 1–4. https://doi.org/10.1109/uffc-js60046.2024.10793916

This work presents an experimental comparative analysis of acoustic performance for series and parallel connected piezoelectric micromachined ultrasonic transducers (PMUTs) designed and fabricated in physical vapor deposition (PVD) lead zirconate titanate (PZT) and 20% scandium (Sc)-doped aluminum nitride (AlN). The aim of this research is to provide insights for optimizing PMUT array design by the choice of electrical connections in relation to material selection. In parallel connection, the current generated by PMUTs is merged and the output impedance of the device becomes lower than the output impedance of single PMUT. In series connection, the output impedance and the voltage output of PMUTs increase with the number of series connections. From the experimental results of a PMUT array with 16-membranes (each membrane represents single PMUT element), series connection shows better receive (RX) sensitivity for PZT with 4.6 mV/ Pa as compared to 2.05 mV/Pa for parallel connection, while ScAlN fared better in parallel connection with 46 mV/Pa as compared to 36 mV/Pa for series connection which are closely matched to simulated values.

Publisher Copyright

This research / project is supported by the Agency for Science, Technology and Research - Industry Alignment Fund – Industry Collaboration Projects (IAF-ICP): Piezo Specialty Lab-in-Fab 2.0 (LiF 2.0)
Grant Reference no. : I2301E0027

© 2024 IEEE.  Personal use of this material is permitted.  Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

https://oar.a-star.edu.sg/communities-collections/articles/21604

2375-0448

Institute of Microelectronics