SC0.15Al0.85N-based 4 GHz Coupled Bulk Acoustic Resonators (CBAR) and Filters for the Single-Chip Duplexer Solution

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SC0.15Al0.85N-based 4 GHz Coupled Bulk Acoustic Resonators (CBAR) and Filters for the Single-Chip Duplexer Solution
Title:
SC0.15Al0.85N-based 4 GHz Coupled Bulk Acoustic Resonators (CBAR) and Filters for the Single-Chip Duplexer Solution
Other Titles:
2021 IEEE International Ultrasonics Symposium (IUS)
Keywords:
Publication Date:
12 November 2021
Citation:
Liu, C., Zhu, Y., Chen, B., & Wang, N. (2021). SC0.15Al0.85N-based 4 GHz Coupled Bulk Acoustic Resonators (CBAR) and Filters for the Single-Chip Duplexer Solution. 2021 IEEE International Ultrasonics Symposium (IUS). https://doi.org/10.1109/ius52206.2021.9593714
Abstract:
In this work, a design of BAW-like thin film resonator is presented and demonstrated with 15% Sc doped AlN piezoelectric material. Utilizing the thickness mode coupled with laterally propagated mode, the proposed coupled bulk acoustic resonator (CBAR) is able to achieve over 4 GHz resonant frequency with 400MHz lithographic tunability and a high effective coupling coefficient over 20%. Filters consisting of the proposed CBARs with different electrode pitches are fabricated on a single-chip. Measurement results show that two discrete filters can operate at 3.85GHz and 4.15GHz with 155MHz and 197MHz bandwidth, respectively. With the same material stack and adjacent operating frequency, these filters provide a promising single-chip duplexer solution for the high frequency filtering applications.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Programmatic - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing (WP5)
Grant Reference no. : A20G9b0135
Description:
© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISBN:
978-1-6654-0355-9
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