Wong, L. M., Chiam, S. Y., Chim, W. K., Pan, J. S., & Wang, S. J. (2013). Highly conductive and transparent aluminum-doped zinc oxide thin films deposited on polyethylene terephthalate substrates by pulsed laser deposition. Thin Solid Films, 545, 285–290. https://doi.org/10.1016/j.tsf.2013.08.069
Abstract:
Highly transparent and conductive aluminum-doped zinc oxide thin films were deposited on low-cost flexible
polyethylene terephthalate substrates at room temperature using pulsed laser deposition and the effects of oxygen
pressure and film thickness on film properties were investigated. It was found that grain sizes play a greater
role only at smaller film thicknesses in affecting carriermobility. Resistivity changes at larger film thickness can be
caused by near surface/interface depletion that affected bothmobility and carrier concentration. The inherent film
transparency did not change and any reduction in the film transmittance is likely related to a thickness dependent
attenuation effect. This means that different transparent conducting oxides should each possess an optimumfilm
thickness, whereby optimized zinc oxide is typically about 100 nm. A low resistivity of ~6.6 × 10−4 Ω cm with a
high normalized transparency index of N0.9 for a 110 ± 10 nm thick room-temperature deposited film was
obtained, representing one of the best results obtained to date.
License type:
Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0)
Funding Info:
There was no specific funding for the research done