Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2al0.8N PMUTs for Pulse-Echo Applications

Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2al0.8N PMUTs for Pulse-Echo Applications

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

10.1109/UFFC-JS60046.2024.10793906

https://doi.org/10.1109/uffc-js60046.2024.10793906

David Sze Wai Choong, Daniel Ssu-Han Chen, Mantalena Sarafianou, Duan Jian Goh, Jihang Liu, Sagnik Ghosh, Prakasha Ramegowda, Srinivas Merugu, Qing Xin Zhang, Peter Chang, Amal Das, Alberto Leotti, Carla Lazzari, Domenico Giusti, Yul Koh

hybrd, pzt, ScAlN, 20%, rangefinder, Piezoelectric pulse-echo, pitch catch, ultrasound testing

18 December 2024

Wai Choong, D. S., Ssu-Han Chen, D., Sarafianou, M., Goh, D. J., Liu, J., Ghosh, S., Ramegowda, P., Merugu, S., Zhang, Q. X., Chang, P., Das, A., Leotti, A., Lazzari, C., Giusti, D., & Koh, Y. (2024). Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2AL0.8N PMUTs for Pulse-Echo Applications. 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 1–4. https://doi.org/10.1109/uffc-js60046.2024.10793906

This paper reports a hybrid air-coupled rangefinder using 20% scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducer (PMUT) as a receiver and sputtered physical vapor deposition (PVD) lead zirconate titanate (PZT) PMUT as a transmitter to leverage the merits of each material. The presented Sc0.20Al0.80N device boasts high receive sensitivities of 22 mV/Pa without amplification and a -3dB bandwidth of 4.07% while the PVD PZT PMUT transmits an ultrasound wave of 0.16 Pa/V at 40 cm distance with a -3dB bandwidth of 38.3% for optimum transmit-receive performance. By optimizing and matching the resonant frequencies of both the Sc0.20Al0.80N receiver and PZT transmitter, a pitch-catch ranging distance of 3-meters was achieved.

Publisher Copyright

This research / project is supported by the Agency for Science, Technology and Research - Industry Alignment Fund – Industry Collaboration Projects (IAFICP): Piezo Specialty Lab-in-Fab 2.0 (LiF 2.0)
Grant Reference no. : I2301E0027

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https://oar.a-star.edu.sg/communities-collections/articles/21605

2375-0448

Institute of Microelectronics