High-Q Microdisk Resonator on Aluminum Nitride Photonics Platform

High-Q Microdisk Resonator on Aluminum Nitride Photonics Platform

CLEO 2024

10.1364/CLEO_AT.2024.JTh2A.28

https://doi.org/10.1364/cleo_at.2024.jth2a.28

Nanxi Li, Landobasa Y M Tobing, Shiyang Zhu, Jin Xue

05 September 2024

Li, N., Tobing, L. Y. M., Zhu, S., & Xue, J. (2024). High-Q Microdisk Resonator on Aluminum Nitride Photonics Platform. CLEO 2024, JTh2A.28. https://doi.org/10.1364/cleo_at.2024.jth2a.28

A high-Q microdisk resonator is demonstrated on aluminum nitride (AlN) photonics platform on an 8-inch silicon wafer. Multiple modes are observed from spectrum response. A loaded Q of 1.3 × 10^5 is also reported.

Publisher Copyright

This research is supported by core funding from: Science and Engineering Research Council Central Funds - Council Strategic Fund
Grant Reference no. : C220415015

© 2024 Optica Publishing Group. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.

https://oar.a-star.edu.sg/communities-collections/articles/21560

https://doi.org/10.1364/CLEO_AT.2024.JTh2A.28

Institute of Microelectronics