Iterative Analysis Approach using interactive Python-FEM to estimate the residual stresses in PMUTs

Iterative Analysis Approach using interactive Python-FEM to estimate the residual stresses in PMUTs

2023 IEEE SENSORS

10.1109/SENSORS56945.2023.10325091

http://dx.doi.org/10.1109/sensors56945.2023.10325091

Prakasha C. Ramegowda, D. S. W. Choong, D. J. Goh, L. Jihang, S. Merugu, P. Chang, A. Leotti, D. Giusti, C. Prelini, S. Ghosh, J. E.-Y. Lee, Y. Koh

28 November 2023

Ramegowda, P. C., Choong, D. S. W., Goh, D. J., Jihang, L., Merugu, S., Chang, P., Leotti, A., Giusti, D., Prelini, C., Ghosh, S., Lee, J. E.-Y., Koh, Y. (2023). Iterative Analysis Approach using interactive Python-FEM to estimate the residual stresses in PMUTs. 2023 IEEE SENSORS, 01–04. https://doi.org/10.1109/sensors56945.2023.10325091

Key performance metrics of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs), such as resonance frequency (fr) and electromechanical coupling kt 2, are significantly impacted by the residual stress. In this study, we present an iterative analysis approach that utilizes interactive Python-FEM to estimate residual stress in PMUTs by integrating optical profile data with a finite element model (FEM) employing Newton-Raphson approximation. The proposed approach is validated using a known solution obtained from COMSOL simulation. We successfully applied this approach to estimate residual stress in three PZT PMUT samples fabricated in a Lab-in-Fab (LiF) facility. The estimated residual stresses are -171 MPa, -111 MPa, and -169 MPa indicate a compressive nature and align with the optical profile data. These values fall within the process condition range for the LiF physical vapor deposited (PVD) leadzirconate- titanate (PZT) PMUT process.

Publisher Copyright

This research / project is supported by the Agency for Science, Technology and Research - Piezo Specialty Lab-in-a-Fab (LIF 1.0)
Grant Reference no. : I1901E0050

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https://oar.a-star.edu.sg/communities-collections/articles/21115

1558-1748

Institute of Microelectronics