D. J. Goh et al., Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap, 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kyoto, Japan, 2023, pp. 1683-1686.
Abstract:
In this work, we present a novel zero-power cantilever type temperature sensor-switch with a sub-micron (~700nm) contact gap. The sub-micron gap enables the device to switch on at just 10°C above room temperature for environmental temperature sensing. The device comprises a bimorph cantilever comprising Silicon (Si) and Aluminum (Al), with Titanium Nitride (TiN) switch contacts at the free end. We successfully demonstrate switch activation at 35°C, drawing an on-state power of <3μW while consuming near zero-power in the off-state. The device could be applied to monitor food storage temperatures where the sensor, as part of a wireless sensor node, is triggered when the room temperature goes above the warning level but draws nearly zero-power otherwise.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Nanosystems at the Edge
Grant Reference no. : A18A4b0055