Citation:
Wang, S., Dhyani, V., Mohanraj, S. S., Shi, X., Varghese, B., Chung, W. W., Huang, D., Lim, Z. S., Zeng, Q., Liu, H., Luo, X., Leong, V., Li, N., & Zhu, D. (2024). CMOS-compatible photonic integrated circuits on thin-film ScAlN. APL Photonics, 9(6). https://doi.org/10.1063/5.0208517