Chong, S. C., Veetil, R. M., Mani, A., Di, Z., Paniagua-Dominguez, R., Kuznetsov, A., & Srinivas, V. (2021). Assembly of Miniature Nanoantenna Spatial Light Modulator. 2021 IEEE 23rd Electronics Packaging Technology Conference (EPTC). https://doi.org/10.1109/eptc53413.2021.9663868
An assembly method was proposed for a novel class of Spatial Light Modulator (SLM) based on metasurfaces embedded in an ultra-thin liquid crystal (LC) cell. The LC cell is based on an ultra-thin gap (as small as 500nm) created between the superstrate (Indium Tin Oxide (ITO) coated glass) and the underlying metasurfaces on device's surface. The establishment of the ultra-thin LC cell is not a trivial process. Six different adhesives were test-out together with different force and temperature to achieve the ultra-thin LC cell. The ultra-thin gap is measured using interferometric method with Ocean Optics (DH-2000) spectrometer. The ultra-thin LC cell is achieved using UV-adhesive together with optimized process flow and parameters.
This research / project is supported by the A*STAR - AME Programmatic
Grant Reference no. : A18A7b0058