Wang, S. (2025). Application of calibrated X-ray computed tomography in micro-scale hidden structure dimensional measurement. Measurement: Sensors, 38, 101662. https://doi.org/10.1016/j.measen.2024.101662
Abstract:
In this paper, the XCT study investigates a high-density stainless steel dog bone sample, a low-density glass fiber with defects and standard artefacts including a hidden step height (nominal value: 120 µm, Type A1) and eight standard cylinders with certified reference diameters ranging from ϕ 0.1299 mm to ϕ 5.1960 mm. For the dog bone sample, its external dimensions up to 45 mm measured by XCT are compared favourably to corresponding dimensions measured by a calibrated digital caliper with a resolution of 0.01 mm. The deviation between XCT and the caliper is found to be less than 30 µm for millimetre dimensions up to 45 mm of the dog bone sample. The deviation of the hidden step height (nominal value: 120 µm) is less than 1.0 µm between XCT and a laser confocal microscope traceable to SI. The results indicate that XCT achieves accurate measurements for dimensions up to 45 mm and is effective in revealing hidden defects from 30 µm to 50 µm in the glass fiber sample. In addition, eight standard cylinders are measured by the proposed XCT, showing a maximum deviation from the reference diameter of less than 6.0 µm.
License type:
Attribution 4.0 International (CC BY 4.0)
Funding Info:
This research / project is supported by the A*STAR - Manufacturing, Trade, and Connectivity Programmatic Fund
Grant Reference no. : M22L2b0111