Miniature Hydrogen Purity (0.1% resolution) and Room Temperature Hydrogen Leakage (20 ppm sensitivity) Sensor Systems for Quality and Leakage Control towards Safe and Sustainable Adoption of Hydrogen

Miniature Hydrogen Purity (0.1% resolution) and Room Temperature Hydrogen Leakage (20 ppm sensitivity) Sensor Systems for Quality and Leakage Control towards Safe and Sustainable Adoption of Hydrogen

2025 IEEE International Electron Devices Meeting (IEDM)

10.1109/IEDM50572.2025.11353597

https://doi.org/10.1109/iedm50572.2025.11353597

Doris K. T. Ng, S. Samanta, Z. Wang, L. Xu, W. Toh, M. Arulchozhan, M. H. K. M. Husni, Z. Chen, Y. Cui, L. J. Kuehsamy, S. J. Seah, Q. Liu, Z. Gu, H. Wang, A. Mukherjee, Rachel C. F. Ang, A. Kong, Kristel P. X. Wee, C. P. Ho, W. Chen, Q. Zhang, F. M. Kai, D. Zhao

Electrical and Electronic Engineering

30 January 2026

Ng, D. K. T., Samanta, S., Wang, Z., Xu, L., Toh, W., Arulchozhan, M., Husni, M. H. K. M., Chen, Z., Cui, Y., Kuehsamy, L. J., Seah, S. J., Liu, Q., Gu, Z., Wang, H., Mukherjee, A., Ang, R. C. F., Kong, A., Wee, K. P. X., Ho, C. P., … Zhao, D. (2025). Miniature Hydrogen Purity (0.1% resolution) and Room Temperature Hydrogen Leakage (20 ppm sensitivity) Sensor Systems for Quality and Leakage Control towards Safe and Sustainable Adoption of Hydrogen. 2025 IEEE International Electron Devices Meeting (IEDM), 1–4. https://doi.org/10.1109/iedm50572.2025.11353597

We develop 2 novel hydrogen (H2) gas sensor systems: (1) H2 purity sensor with high resolution down to 0.1%, allowing direct measurement of H2 purity and differentiating H2 concentration between 99.8% and 99.9% and (2) back-end of line (BEOL)–compatible (< 400 °C) cross-point resistive random access memory (RRAM)-based H2 leakage sensor packaged with microcontroller unit (MCU) achieving H2 sensing at record low 20 ppm level at room temperature for any kind of metal-insulator (semiconductor)-metal MI(S)M-based H2 leakage sensors. The thumb-size H2 purity sensor developed with a novel design configuration using 20% scandium aluminum nitride (ScAlN)-based pyroelectric detector allows for in-line real-time monitoring of H2 purity concentration which could be integrated into systems such as electrolyzers to control quality of H2 produced. The Pd/Ta2O5/TiW RRAM-based H2 leakage sensor uses palladium (Pd) as the sensing layer and Zeolitic Imidazolate Framework-8 (ZIF-8) on the Pd enabling high H2 selectivity. This portable H2 leakage sensor features no significant degradation (<10%) after one month, and highly resistant to 95% relative humidity (RH). Both sensors developed will open up pathways pivotal towards quality and leakage control as we move towards safe and sustainable adoption of H2.

Publisher Copyright

This research / project is supported by the National Research Foundation and A*STAR - Low-carbon energy research Funding initiative
Grant Reference no. : U2102d2012

This research / project is supported by the National Research Foundation and A*STAR - Low-carbon energy research Phase 2
Grant Reference no. : U2303D4001

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2156-017X

Institute of Microelectronics