Wai Choong, D. S., Sarafianou, M., Goh, D. J., Ghosh, S., & Koh, Y. (2024). Ultrasonic Imaging and PROFILOMETRY Using Synthetic Aperture with MHz PMUTs in Air. 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 1–4. https://doi.org/10.1109/uffc-js60046.2024.10793977
Abstract:
In this work, we demonstrate the functionality of
using a single channel 15% Scandium doped Aluminum nitride
(ScAlN) 3 mm × 3 mm, silicon-on-nothing (SON) piezoelectric
micromachined ultrasonic transducer (PMUT) array to
provide accurate profilometry and imaging via synthethic
aperture (SA) in contrast to traditional delay-multiply-andsum
image reconstruction. The 16 × 15 array in parallel, with
resonant frequency of 1.15 MHz, was used to send and receive
pulse-echo signals to and from various jigs to reconstruct and
measure the surface profiles of the 2D scans. A precision stage
controller was used to move the PMUT chip in 50 μm steps in
the x-y plane and a sub-resonant signal of 750kHz was
transmitted. The array of signals was then digitally processed
to achieve high-resolution images and profile scans with
minimum lateral resolution of 0.8 mm and axial resolution of
less than 0.05 mm.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Agency for Science, Technology and Research - Industry Alignment Funds: Nanosystems at the Edge
Grant Reference no. : A18A4b0055