Chen, D. S.-H., Trivedi, S., Marvin Tan, X. H., Shun Teo, Y., Sharma, J., Yang, Z., Bui, V. P., Eng Png, C., Lal, A., & Chuan Chai, K. T. (2023, September 3). Analysis Of Crosstalk in Binary Weighted Bulk Acoustic Wave Transducers For Ultrasonic Based Fourier Transform Accelerators. 2023 IEEE International Ultrasonics Symposium (IUS). https://doi.org/10.1109/ius51837.2023.10307887
Abstract:
This work reports a 7.5MHz sputtered Lead Zirconate Titanate (PZT) piezoelectric micromachined ultrasonic transducer (pMUT) array that demonstrates both strong transmit (9.3kPa/V/mm 2 ) and receive performance (6.5V/MPa) characterized in immersion without signal amplification and within a 5mm 2 aperture. This paper presents yet higher RX sensitivities for the proposed device even with a direct connection to an oscilloscope. We elucidate the effect of DC bias on the acoustic transmit (TX) and receive (RX) characteristics of PZT pMUTs, and how these could be tuned to increase the performance of the pMUTs. The device was fabricated at wafer-scale in our 8-inch line, which is capable of physical vapor deposition (PVD) of high quality PZT.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - RIE2020 Advanced Manufacturing and Engineering Programmatic (Ultrasonic Wavefront Computing)
Grant Reference no. : A19E8b0102