Qian, Y., Wang, X., Zhang, Y., Liu, C., & Zhu, Y. (2024, May 13). Demonstration of 8-Inch Thin-Film $\text{Sc}_{0.3}\mathrm{A}1_{0.7}\mathrm{N}$ BAW Resonator with High Electromechanical Coupling Coefficient. 2024 IEEE MTT-S International Conference on Microwave Acoustics Amp; Mechanics (IC-MAM). https://doi.org/10.1109/ic-mam60575.2024.10539044
Abstract:
In this study, we introduce the development of high-quality Sc0.3Al0.7N thin films (≤500 nm) for BAW resonators operating at 4 GHz and 6 GHz. Our findings reveal a substantial enhancement in the material coupling coefficient, exceeding 23%. This advancement enhances the potential of BAW technology in meeting the requirements of emerging wireless communication standards, particularly in terms of bandwidth.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Science and Engineering Research Council of A*STAR (Agency for Science, Technology, and Research) Singapore - NA
Grant Reference no. : A20G9b0135