Nonlinear optical characterization of deuterated silicon-rich nitride waveguides

Nonlinear optical characterization of deuterated silicon-rich nitride waveguides

OSA Nonlinear Optics 2021

10.1364/NLO.2021.NM2A.7

http://dx.doi.org/10.1364/nlo.2021.nm2a.7

X. X. Chia, G. F. R. Chen, Y. M. Cao, D. K. T. Ng, P. Xing, D. T. H. Tan

18 January 2022

Chia, X. X., Chen, G. F. R., Cao, Y. M., Ng, D. K. T., Xing, P., & Tan, D. T. H. (2021). Nonlinear optical characterization of deuterated silicon-rich nitride waveguides. OSA Nonlinear Optics 2021. https://doi.org/10.1364/nlo.2021.nm2a.7

Nonlinear optical characterization of Silicon-Rich Nitride waveguides fabricated using deuterated silane are presented. Fourier Transform Infrared Spectroscopy reveals the absence of Si-H and N-H related bonds known to cause optical absorption close to a wavelength of 1550nm.

Publisher Copyright

This research / project is supported by the National Research Foundation - Competitive Research Grant
Grant Reference no. : NRF-CRP18-2017-03

This research / project is supported by the Ministry of Education - ACRF Tier 2
Grant Reference no. : NA

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https://oar.a-star.edu.sg/communities-collections/articles/18789

978-1-943580-97-2

Institute of Microelectronics