High Birefringence in CMOS-compatible ultra-silicon rich nitride vertical slot waveguides

High Birefringence in CMOS-compatible ultra-silicon rich nitride vertical slot waveguides

2021 IEEE Photonics Conference (IPC)

10.1109/IPC48725.2021.9593027

http://dx.doi.org/10.1109/ipc48725.2021.9593027

Abhijit K. Gupta, George F. R. Chen, Hongwei Gao, Doris K. T. Ng, Dawn T. H. Tan

13 November 2021

Gupta, A. K., Chen, G. F. R., Gao, H., Ng, D. K. T., & Tan, D. T. H. (2021). High Birefringence in CMOS-compatible ultra-silicon rich nitride vertical slot waveguides. 2021 IEEE Photonics Conference (IPC). https://doi.org/10.1109/ipc48725.2021.9593027

We demonstrate slot waveguides on ultra-silicon-rich nitride designed for optimal high group index birefringence (>1) . High speed characterization using 30Gb/s non-return-to-zero and 56Gb/s pulsed amplitude modulation 4 data are performed on fabricated waveguides showing error-free performance.

Publisher Copyright

This research / project is supported by the National Research Foundation - Competitive Research Grant
Grant Reference no. : NRF-CRP18-2017-03

This research / project is supported by the Ministry of Education - ACRF Tier 2
Grant Reference no. : N.A

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https://oar.a-star.edu.sg/communities-collections/articles/18452

978-1-6654-1601-6

Institute of Microelectronics